Modelling of microfabrication systems /

Antzeko izenburuak

• Microfabrication and nanomanufacturing /
  nork: Jackson, Mark J.
  Argitaratua: (2005)
• Fundamentals of microfabrication : the science of miniaturization /
  nork: 302240 Madou, Marc J.
  Argitaratua: (2002)
• Hermeticity testing of mems and microelectronic packages /
  nork: Costello, Suzanna, et al.
  Argitaratua: (2013)
• The MEMS handbook /
  nork: Gad-el-Hak, Mohamed, 1945-
  Argitaratua: (2006)
• Mems and microsystems : design, manufacture, and packaging /
  nork: Hsu, Tai-Ran 332645
  Argitaratua: (2008)