Modelling of microfabrication systems /

Geahča maid

• Microfabrication and nanomanufacturing /
  Dahkki: Jackson, Mark J.
  Almmustuhtton: (2005)
• Fundamentals of microfabrication : the science of miniaturization /
  Dahkki: 302240 Madou, Marc J.
  Almmustuhtton: (2002)
• Hermeticity testing of mems and microelectronic packages /
  Dahkki: Costello, Suzanna, et al.
  Almmustuhtton: (2013)
• The MEMS handbook /
  Dahkki: Gad-el-Hak, Mohamed, 1945-
  Almmustuhtton: (2006)
• Mems and microsystems : design, manufacture, and packaging /
  Dahkki: Hsu, Tai-Ran 332645
  Almmustuhtton: (2008)