Smart sensors and MEMS /
16
| Main Authors: | , , , |
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| Format: | |
| Language: | eng |
| Published: |
Dordrecht : Kluwer Academic Publishers,
2004
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| Subjects: |
| _version_ | 1796721686769303552 |
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| author | NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Povoa de Varzim, Portugal) Yurish, Sergey Y. Gomes, Maria Teresa S. R. North Atlantic Treaty Organization. Scientific Affairs Division |
| author_facet | NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Povoa de Varzim, Portugal) Yurish, Sergey Y. Gomes, Maria Teresa S. R. North Atlantic Treaty Organization. Scientific Affairs Division |
| author_sort | NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Povoa de Varzim, Portugal) |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T07:04:56Z |
| format | |
| id | KOHA-OAI-TEST:371779 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T07:04:56Z |
| publishDate | 2004 |
| publisher | Dordrecht : Kluwer Academic Publishers, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3717792020-12-19T17:12:56ZSmart sensors and MEMS / NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Povoa de Varzim, Portugal) Yurish, Sergey Y. Gomes, Maria Teresa S. R. North Atlantic Treaty Organization. Scientific Affairs Division Dordrecht : Kluwer Academic Publishers,2004eng16PSZJBLDetectorsMicroelectromechanical systemsScanning systemsURN:ISBN:1402029284 (pbk.) |
| spellingShingle | Detectors Microelectromechanical systems Scanning systems NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Povoa de Varzim, Portugal) Yurish, Sergey Y. Gomes, Maria Teresa S. R. North Atlantic Treaty Organization. Scientific Affairs Division Smart sensors and MEMS / |
| title | Smart sensors and MEMS / |
| title_full | Smart sensors and MEMS / |
| title_fullStr | Smart sensors and MEMS / |
| title_full_unstemmed | Smart sensors and MEMS / |
| title_short | Smart sensors and MEMS / |
| title_sort | smart sensors and mems |
| topic | Detectors Microelectromechanical systems Scanning systems |
| work_keys_str_mv | AT natoadvancedstudyinstituteonsmartsensorsandmems2003povoadevarzimportugal smartsensorsandmems AT yurishsergeyy smartsensorsandmems AT gomesmariateresasr smartsensorsandmems AT northatlantictreatyorganizationscientificaffairsdivision smartsensorsandmems |