Post-processing techniques for integrated MEMS /
16
| Glavni autor: | |
|---|---|
| Format: | |
| Jezik: | eng |
| Izdano: |
London : Artech House,
2006
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| Teme: |
| _version_ | 1826432167440285696 |
|---|---|
| author | 303253 Sedky, Sherif |
| author_facet | 303253 Sedky, Sherif |
| author_sort | 303253 Sedky, Sherif |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T07:26:43Z |
| format | |
| id | KOHA-OAI-TEST:378983 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T07:26:43Z |
| publishDate | 2006 |
| publisher | London : Artech House, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3789832020-12-19T17:13:12ZPost-processing techniques for integrated MEMS / 303253 Sedky, Sherif London : Artech House,2006eng16PSZJBLMicroelectromechanical systemsURN:ISBN:1580539017 (hbk.) |
| spellingShingle | Microelectromechanical systems 303253 Sedky, Sherif Post-processing techniques for integrated MEMS / |
| title | Post-processing techniques for integrated MEMS / |
| title_full | Post-processing techniques for integrated MEMS / |
| title_fullStr | Post-processing techniques for integrated MEMS / |
| title_full_unstemmed | Post-processing techniques for integrated MEMS / |
| title_short | Post-processing techniques for integrated MEMS / |
| title_sort | post processing techniques for integrated mems |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT 303253sedkysherif postprocessingtechniquesforintegratedmems |