Dynamical simulation for sputtering of B4C /
40
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Nagoya, Japan : NIFS,
1998
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_version_ | 1826432387239641088 |
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author | T. Kenmotsu |
author_facet | T. Kenmotsu |
author_sort | T. Kenmotsu |
collection | OCEAN |
description | 40 |
first_indexed | 2024-03-05T07:30:03Z |
format | |
id | KOHA-OAI-TEST:380088 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-05T07:30:03Z |
publishDate | 1998 |
publisher | Nagoya, Japan : NIFS, |
record_format | dspace |
spelling | KOHA-OAI-TEST:3800882020-12-19T17:13:15ZDynamical simulation for sputtering of B4C / T. Kenmotsu Nagoya, Japan : NIFS,19984012PSZJBLIon bombardmentSputtering (Physics) |
spellingShingle | Ion bombardment Sputtering (Physics) T. Kenmotsu Dynamical simulation for sputtering of B4C / |
title | Dynamical simulation for sputtering of B4C / |
title_full | Dynamical simulation for sputtering of B4C / |
title_fullStr | Dynamical simulation for sputtering of B4C / |
title_full_unstemmed | Dynamical simulation for sputtering of B4C / |
title_short | Dynamical simulation for sputtering of B4C / |
title_sort | dynamical simulation for sputtering of b4c |
topic | Ion bombardment Sputtering (Physics) |
work_keys_str_mv | AT tkenmotsu dynamicalsimulationforsputteringofb4c |