Microfabrication and nanomanufacturing /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
New York,NY : CRC Press ,
2005
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| Subjects: |
| _version_ | 1796723880677605376 |
|---|---|
| author | Jackson, Mark J. |
| author_facet | Jackson, Mark J. |
| author_sort | Jackson, Mark J. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T07:36:57Z |
| format | |
| id | KOHA-OAI-TEST:382371 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T07:36:57Z |
| publishDate | 2005 |
| publisher | New York,NY : CRC Press , |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3823712020-12-19T17:13:20ZMicrofabrication and nanomanufacturing / Jackson, Mark J. New York,NY : CRC Press , 2005eng16PSZJBLMicroelectronicsIntegrated circuitsMicroelectromechanical systemsURN:ISBN:0824724313 (hbk.) |
| spellingShingle | Microelectronics Integrated circuits Microelectromechanical systems Jackson, Mark J. Microfabrication and nanomanufacturing / |
| title | Microfabrication and nanomanufacturing / |
| title_full | Microfabrication and nanomanufacturing / |
| title_fullStr | Microfabrication and nanomanufacturing / |
| title_full_unstemmed | Microfabrication and nanomanufacturing / |
| title_short | Microfabrication and nanomanufacturing / |
| title_sort | microfabrication and nanomanufacturing |
| topic | Microelectronics Integrated circuits Microelectromechanical systems |
| work_keys_str_mv | AT jacksonmarkj microfabricationandnanomanufacturing |