Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
PSZJBL
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Boca Raton: CRC Press,
2000
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Online Access: | http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434 |
_version_ | 1826434932731281408 |
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author | 290823 Lyshevski, Sergey Edward |
author_facet | 290823 Lyshevski, Sergey Edward |
author_sort | 290823 Lyshevski, Sergey Edward |
collection | OCEAN |
description | PSZJBL |
first_indexed | 2024-03-05T08:08:04Z |
format | |
id | KOHA-OAI-TEST:392742 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-05T08:08:04Z |
publishDate | 2000 |
publisher | Boca Raton: CRC Press, |
record_format | dspace |
spelling | KOHA-OAI-TEST:3927422020-12-19T17:13:42ZNano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] 290823 Lyshevski, Sergey Edward Electronic books Boca Raton: CRC Press, 2000PSZJBLNonotechnologyMicroelectromechanical systemsMicroelectronic packaginghttp://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434Accessible within UTM campus |
spellingShingle | Nonotechnology Microelectromechanical systems Microelectronic packaging 290823 Lyshevski, Sergey Edward Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title_full | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title_fullStr | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title_full_unstemmed | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title_short | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
title_sort | nano microelectromechanical systems fundamentals of nano nanoengineering electronic resources |
topic | Nonotechnology Microelectromechanical systems Microelectronic packaging |
url | http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434 |
work_keys_str_mv | AT 290823lyshevskisergeyedward nanomicroelectromechanicalsystemsfundamentalsofnanonanoengineeringelectronicresources |