Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]

PSZJBL

Bibliographic Details
Main Author: 290823 Lyshevski, Sergey Edward
Format:
Published: Boca Raton: CRC Press, 2000
Subjects:
Online Access:http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434
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author 290823 Lyshevski, Sergey Edward
author_facet 290823 Lyshevski, Sergey Edward
author_sort 290823 Lyshevski, Sergey Edward
collection OCEAN
description PSZJBL
first_indexed 2024-03-05T08:08:04Z
format
id KOHA-OAI-TEST:392742
institution Universiti Teknologi Malaysia - OCEAN
last_indexed 2024-03-05T08:08:04Z
publishDate 2000
publisher Boca Raton: CRC Press,
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spelling KOHA-OAI-TEST:3927422020-12-19T17:13:42ZNano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] 290823 Lyshevski, Sergey Edward Electronic books Boca Raton: CRC Press, 2000PSZJBLNonotechnologyMicroelectromechanical systemsMicroelectronic packaginghttp://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434Accessible within UTM campus
spellingShingle Nonotechnology
Microelectromechanical systems
Microelectronic packaging
290823 Lyshevski, Sergey Edward
Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title_full Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title_fullStr Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title_full_unstemmed Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title_short Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
title_sort nano microelectromechanical systems fundamentals of nano nanoengineering electronic resources
topic Nonotechnology
Microelectromechanical systems
Microelectronic packaging
url http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434
work_keys_str_mv AT 290823lyshevskisergeyedward nanomicroelectromechanicalsystemsfundamentalsofnanonanoengineeringelectronicresources