Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
PSZJBL
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Boca Raton: CRC Press,
2000
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| Online Access: | http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434 |
| _version_ | 1826434932731281408 |
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| author | 290823 Lyshevski, Sergey Edward |
| author_facet | 290823 Lyshevski, Sergey Edward |
| author_sort | 290823 Lyshevski, Sergey Edward |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-05T08:08:04Z |
| format | |
| id | KOHA-OAI-TEST:392742 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:08:04Z |
| publishDate | 2000 |
| publisher | Boca Raton: CRC Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3927422020-12-19T17:13:42ZNano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] 290823 Lyshevski, Sergey Edward Electronic books Boca Raton: CRC Press, 2000PSZJBLNonotechnologyMicroelectromechanical systemsMicroelectronic packaginghttp://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434Accessible within UTM campus |
| spellingShingle | Nonotechnology Microelectromechanical systems Microelectronic packaging 290823 Lyshevski, Sergey Edward Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title_full | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title_fullStr | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title_full_unstemmed | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title_short | Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources] |
| title_sort | nano microelectromechanical systems fundamentals of nano nanoengineering electronic resources |
| topic | Nonotechnology Microelectromechanical systems Microelectronic packaging |
| url | http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434 |
| work_keys_str_mv | AT 290823lyshevskisergeyedward nanomicroelectromechanicalsystemsfundamentalsofnanonanoengineeringelectronicresources |