Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]

Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]

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Bibliographic Details
Main Author:	290823 Lyshevski, Sergey Edward
Format:
Published:	Boca Raton: CRC Press, 2000
Subjects:	Nonotechnology Microelectromechanical systems Microelectronic packaging
Online Access:	http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434

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