Nano & microelectromechanical systems: fundamentals of nano & nanoengineering / [electronic resources]
PSZJBL
Main Author: | 290823 Lyshevski, Sergey Edward |
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Format: | |
Published: |
Boca Raton: CRC Press,
2000
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Subjects: | |
Online Access: | http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=434 |
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