Journal of vacuum science and technology
20
| Main Author: | |
|---|---|
| Format: | |
| Published: |
New York : American Institute of Physics,
1964
|
| Subjects: |
| _version_ | 1826435600896491520 |
|---|---|
| author | American Vacuum Society |
| author_facet | American Vacuum Society |
| author_sort | American Vacuum Society |
| collection | OCEAN |
| description | 20 |
| first_indexed | 2024-03-05T08:18:08Z |
| format | |
| id | KOHA-OAI-TEST:396096 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:18:08Z |
| publishDate | 1964 |
| publisher | New York : American Institute of Physics, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3960962020-12-19T17:13:50ZJournal of vacuum science and technology American Vacuum Society New York : American Institute of Physics,1964-198220PSZJBLVacuum technology |
| spellingShingle | Vacuum technology American Vacuum Society Journal of vacuum science and technology |
| title | Journal of vacuum science and technology |
| title_full | Journal of vacuum science and technology |
| title_fullStr | Journal of vacuum science and technology |
| title_full_unstemmed | Journal of vacuum science and technology |
| title_short | Journal of vacuum science and technology |
| title_sort | journal of vacuum science and technology |
| topic | Vacuum technology |
| work_keys_str_mv | AT americanvacuumsociety journalofvacuumscienceandtechnology |