Journal of vacuum science and technology

20

Bibliographic Details
Main Author: American Vacuum Society
Format:
Published: New York : American Institute of Physics, 1964
Subjects:
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author American Vacuum Society
author_facet American Vacuum Society
author_sort American Vacuum Society
collection OCEAN
description 20
first_indexed 2024-03-05T08:18:08Z
format
id KOHA-OAI-TEST:396096
institution Universiti Teknologi Malaysia - OCEAN
last_indexed 2024-03-05T08:18:08Z
publishDate 1964
publisher New York : American Institute of Physics,
record_format dspace
spelling KOHA-OAI-TEST:3960962020-12-19T17:13:50ZJournal of vacuum science and technology American Vacuum Society New York : American Institute of Physics,1964-198220PSZJBLVacuum technology
spellingShingle Vacuum technology
American Vacuum Society
Journal of vacuum science and technology
title Journal of vacuum science and technology
title_full Journal of vacuum science and technology
title_fullStr Journal of vacuum science and technology
title_full_unstemmed Journal of vacuum science and technology
title_short Journal of vacuum science and technology
title_sort journal of vacuum science and technology
topic Vacuum technology
work_keys_str_mv AT americanvacuumsociety journalofvacuumscienceandtechnology