Journal of vacuum science and technology A
20
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| Format: | |
| Published: |
New York : American Institute of Physics,
1983
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| Subjects: |
| _version_ | 1796726748033843200 |
|---|---|
| author | American Vacuum Technology |
| author_facet | American Vacuum Technology |
| author_sort | American Vacuum Technology |
| collection | OCEAN |
| description | 20 |
| first_indexed | 2024-03-05T08:18:08Z |
| format | |
| id | KOHA-OAI-TEST:396097 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:18:08Z |
| publishDate | 1983 |
| publisher | New York : American Institute of Physics, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3960972020-12-19T17:13:50ZJournal of vacuum science and technology A American Vacuum Technology New York : American Institute of Physics,1983-20PSZJBLVacuum technology |
| spellingShingle | Vacuum technology American Vacuum Technology Journal of vacuum science and technology A |
| title | Journal of vacuum science and technology A |
| title_full | Journal of vacuum science and technology A |
| title_fullStr | Journal of vacuum science and technology A |
| title_full_unstemmed | Journal of vacuum science and technology A |
| title_short | Journal of vacuum science and technology A |
| title_sort | journal of vacuum science and technology a |
| topic | Vacuum technology |
| work_keys_str_mv | AT americanvacuumtechnology journalofvacuumscienceandtechnologya |