Microelectronic engineering : an international journal of semiconductor manufacturing technology
12
| Format: | |
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| Published: |
Amsterdam : North-Holland Pub.,
1983
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| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/journal/01679317 |
| _version_ | 1826435629267812352 |
|---|---|
| collection | OCEAN |
| description | 12 |
| first_indexed | 2024-03-05T08:18:33Z |
| format | |
| id | KOHA-OAI-TEST:396240 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:18:33Z |
| publishDate | 1983 |
| publisher | Amsterdam : North-Holland Pub., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3962402020-12-19T17:13:50ZMicroelectronic engineering : an international journal of semiconductor manufacturing technologyAmsterdam : North-Holland Pub.,1983-12PSZJBLMicroelectronicsMicroelectronicshttp://www.sciencedirect.com/science/journal/01679317ScienceDirect is open access to UTM community only |
| spellingShingle | Microelectronics Microelectronics Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title | Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title_full | Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title_fullStr | Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title_full_unstemmed | Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title_short | Microelectronic engineering : an international journal of semiconductor manufacturing technology |
| title_sort | microelectronic engineering an international journal of semiconductor manufacturing technology |
| topic | Microelectronics Microelectronics |
| url | http://www.sciencedirect.com/science/journal/01679317 |