Journal of vacuum science and technology B
20
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| Format: | |
| Published: |
New York : American Institute of Physics,
1983
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| Subjects: |
| _version_ | 1796726806479372288 |
|---|---|
| author | American Vacuum Society |
| author_facet | American Vacuum Society |
| author_sort | American Vacuum Society |
| collection | OCEAN |
| description | 20 |
| first_indexed | 2024-03-05T08:19:00Z |
| format | |
| id | KOHA-OAI-TEST:396396 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:19:00Z |
| publishDate | 1983 |
| publisher | New York : American Institute of Physics, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3963962020-12-19T17:13:51ZJournal of vacuum science and technology B American Vacuum Society New York : American Institute of Physics,1983-20PSZJBLVacuum technology |
| spellingShingle | Vacuum technology American Vacuum Society Journal of vacuum science and technology B |
| title | Journal of vacuum science and technology B |
| title_full | Journal of vacuum science and technology B |
| title_fullStr | Journal of vacuum science and technology B |
| title_full_unstemmed | Journal of vacuum science and technology B |
| title_short | Journal of vacuum science and technology B |
| title_sort | journal of vacuum science and technology b |
| topic | Vacuum technology |
| work_keys_str_mv | AT americanvacuumsociety journalofvacuumscienceandtechnologyb |