Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems
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| Main Authors: | , |
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| Format: | |
| Published: |
New York : IEEE,
1992
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| Subjects: | |
| Online Access: | http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=84 |
| _version_ | 1796727077906415616 |
|---|---|
| author | Institute of Electrical and Electronics Engineers American Society of Mechanical Engineers |
| author_facet | Institute of Electrical and Electronics Engineers American Society of Mechanical Engineers |
| author_sort | Institute of Electrical and Electronics Engineers |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T08:23:03Z |
| format | |
| id | KOHA-OAI-TEST:397774 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T08:23:03Z |
| publishDate | 1992 |
| publisher | New York : IEEE, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3977742020-12-19T17:13:53ZJournal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems Institute of Electrical and Electronics Engineers American Society of Mechanical Engineers New York : IEEE,1992-16PSZJBLMicroelectronicsElectromechanical deviceshttp://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=84Open access to UTM community only |
| spellingShingle | Microelectronics Electromechanical devices Institute of Electrical and Electronics Engineers American Society of Mechanical Engineers Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title | Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title_full | Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title_fullStr | Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title_full_unstemmed | Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title_short | Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems |
| title_sort | journal of microelectromechanical systems a joint ieee and asme publication on microstructures microsensors and microsystems |
| topic | Microelectronics Electromechanical devices |
| url | http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=84 |
| work_keys_str_mv | AT instituteofelectricalandelectronicsengineers journalofmicroelectromechanicalsystemsajointieeeandasmepublicationonmicrostructuresmicrosensorsandmicrosystems AT americansocietyofmechanicalengineers journalofmicroelectromechanicalsystemsajointieeeandasmepublicationonmicrostructuresmicrosensorsandmicrosystems |