Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems

Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microsensors and microsystems

16

Bibliographic Details
Main Authors:	Institute of Electrical and Electronics Engineers, American Society of Mechanical Engineers
Format:
Published:	New York : IEEE, 1992
Subjects:	Microelectronics Electromechanical devices
Online Access:	http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=84

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