Micromachining of silicon wafer to mirror finish [electronic resource] /
Project Paper (Sarjana Muda Kejuruteraan Mekanikal (Pembuatan)) - Universiti Teknologi Malaysia, 2007
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Skudai : Universiti Teknologi Malaysia,
2007
|
| Subjects: |
| _version_ | 1796729475116826624 |
|---|---|
| author | 401104 Law, Choon Ming Fakulti Kejuruteraan Mekanikal |
| author_facet | 401104 Law, Choon Ming Fakulti Kejuruteraan Mekanikal |
| author_sort | 401104 Law, Choon Ming |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda Kejuruteraan Mekanikal (Pembuatan)) - Universiti Teknologi Malaysia, 2007 |
| first_indexed | 2024-03-05T08:57:23Z |
| format | |
| id | KOHA-OAI-TEST:409260 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T08:57:23Z |
| publishDate | 2007 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4092602020-12-19T17:14:17ZMicromachining of silicon wafer to mirror finish [electronic resource] / 401104 Law, Choon Ming Fakulti Kejuruteraan Mekanikal Skudai : Universiti Teknologi Malaysia,2007engProject Paper (Sarjana Muda Kejuruteraan Mekanikal (Pembuatan)) - Universiti Teknologi Malaysia, 2007Includes bibliographical referencesPSZJBLMicromachiningSilicon |
| spellingShingle | Micromachining Silicon 401104 Law, Choon Ming Fakulti Kejuruteraan Mekanikal Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title | Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title_full | Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title_fullStr | Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title_full_unstemmed | Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title_short | Micromachining of silicon wafer to mirror finish [electronic resource] / |
| title_sort | micromachining of silicon wafer to mirror finish electronic resource |
| topic | Micromachining Silicon |
| work_keys_str_mv | AT 401104lawchoonming micromachiningofsiliconwafertomirrorfinishelectronicresource AT fakultikejuruteraanmekanikal micromachiningofsiliconwafertomirrorfinishelectronicresource |