Micromachining of silicon wafer to mirror finish [electronic resource] /
Project Paper (Sarjana Muda Kejuruteraan Mekanikal (Pembuatan)) - Universiti Teknologi Malaysia, 2007
Main Authors: | 401104 Law, Choon Ming, Fakulti Kejuruteraan Mekanikal |
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Format: | |
Language: | eng |
Published: |
Skudai : Universiti Teknologi Malaysia,
2007
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Subjects: |
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