Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal]
PSZJBL
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| Online Access: | http://www.sciencedirect.com/science/journal/01679317 |
| _version_ | 1826438715609710592 |
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| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-05T09:04:26Z |
| format | |
| id | KOHA-OAI-TEST:411592 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T09:04:26Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4115922020-12-19T17:14:22ZMicroelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal]PSZJBLMicroelectronicsMicroelectronicshttp://www.sciencedirect.com/science/journal/01679317Accessible within UTM campus |
| spellingShingle | Microelectronics Microelectronics Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title | Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title_full | Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title_fullStr | Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title_full_unstemmed | Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title_short | Microelectronic engineering : an international journal of semiconductor manufacturing technology [electronic journal] |
| title_sort | microelectronic engineering an international journal of semiconductor manufacturing technology electronic journal |
| topic | Microelectronics Microelectronics |
| url | http://www.sciencedirect.com/science/journal/01679317 |