The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique [compact disc] /
Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2005
Main Author: | |
---|---|
Format: | |
Language: | eng |
Published: |
Skudai : Universiti Teknologi Malaysia,
2005
|
Subjects: |
Summary: | Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2005 |
---|