Comprehensive microsystems /

Geahča maid

• Reliability of MEMS /
  Dahkki: Tabata, Osamu, 1956-, et al.
  Almmustuhtton: (2008)
• Microsystems mechanical design /
  Dahkki: De Bona, Francesco, et al.
  Almmustuhtton: (2006)
• Cost-driven design of smart microsystems /
  Dahkki: Niedermayer, Michael, 1971-
  Almmustuhtton: (c201)
• Microsystem design /
  Dahkki: Senturia, Stephen D., 1940-
  Almmustuhtton: (2001)
• Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /
  Dahkki: Nihtianov, Stoyan, editor, et al.
  Almmustuhtton: (2014)