Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition /
Thesis (Sarjana Kejuruteraan (Mekanikal - Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2010
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| Language: | eng |
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2010
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| _version_ | 1796734419422150656 |
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| author | Idris Saaran, 1985- Izman Sudin Engku Mohd. Nazim Engku Abu Bakar, supervisor Fakulti Kejuruteraan Mekanikal |
| author_facet | Idris Saaran, 1985- Izman Sudin Engku Mohd. Nazim Engku Abu Bakar, supervisor Fakulti Kejuruteraan Mekanikal |
| author_sort | Idris Saaran, 1985- |
| collection | OCEAN |
| description | Thesis (Sarjana Kejuruteraan (Mekanikal - Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2010 |
| first_indexed | 2024-03-05T10:06:41Z |
| format | |
| id | KOHA-OAI-TEST:432317 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T10:06:41Z |
| publishDate | 2010 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4323172020-12-19T17:15:28ZEffect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / Idris Saaran, 1985- Izman Sudin Engku Mohd. Nazim Engku Abu Bakar, supervisor Fakulti Kejuruteraan Mekanikal 2010engThesis (Sarjana Kejuruteraan (Mekanikal - Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2010FEMELDiamonds, ArtificialChemical vapor deposition |
| spellingShingle | Diamonds, Artificial Chemical vapor deposition Idris Saaran, 1985- Izman Sudin Engku Mohd. Nazim Engku Abu Bakar, supervisor Fakulti Kejuruteraan Mekanikal Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title | Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title_full | Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title_fullStr | Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title_full_unstemmed | Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title_short | Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition / |
| title_sort | effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition |
| topic | Diamonds, Artificial Chemical vapor deposition |
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