Introduction to microelectronic fabrication /
Includes bibliographical references and index
| Main Author: | |
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| Format: | |
| Language: | eng |
| Published: |
Upper Saddle River, N.J. : Prentice Hall,
c200
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| Subjects: |
| _version_ | 1826443009775894528 |
|---|---|
| author | 323155 Jaeger, Richard C. |
| author_facet | 323155 Jaeger, Richard C. |
| author_sort | 323155 Jaeger, Richard C. |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T10:07:09Z |
| format | |
| id | KOHA-OAI-TEST:432476 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T10:07:09Z |
| publishDate | c200 |
| publisher | Upper Saddle River, N.J. : Prentice Hall, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4324762020-12-19T17:15:29ZIntroduction to microelectronic fabrication / 323155 Jaeger, Richard C. Upper Saddle River, N.J. : Prentice Hall,c2002engIncludes bibliographical references and indexPSZJBLIntegrated circuitsURN:ISBN:0201444941 (hbk.) |
| spellingShingle | Integrated circuits 323155 Jaeger, Richard C. Introduction to microelectronic fabrication / |
| title | Introduction to microelectronic fabrication / |
| title_full | Introduction to microelectronic fabrication / |
| title_fullStr | Introduction to microelectronic fabrication / |
| title_full_unstemmed | Introduction to microelectronic fabrication / |
| title_short | Introduction to microelectronic fabrication / |
| title_sort | introduction to microelectronic fabrication |
| topic | Integrated circuits |
| work_keys_str_mv | AT 323155jaegerrichardc introductiontomicroelectronicfabrication |