Introduction to microfabrication /
PSZJBL
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons,
2010
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| Subjects: |
| _version_ | 1826443864170299392 |
|---|---|
| author | 221658 Franssila, Sami |
| author_facet | 221658 Franssila, Sami |
| author_sort | 221658 Franssila, Sami |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-05T10:19:39Z |
| format | |
| id | KOHA-OAI-TEST:436651 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T10:19:39Z |
| publishDate | 2010 |
| publisher | Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4366512020-12-19T17:15:42ZIntroduction to microfabrication / 221658 Franssila, Sami Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons,2010engPSZJBLMicroelectromechanical systemsElectronic apparatus and appliancesMicrofabricationURN:ISBN:9780470749838 (cloth) |
| spellingShingle | Microelectromechanical systems Electronic apparatus and appliances Microfabrication 221658 Franssila, Sami Introduction to microfabrication / |
| title | Introduction to microfabrication / |
| title_full | Introduction to microfabrication / |
| title_fullStr | Introduction to microfabrication / |
| title_full_unstemmed | Introduction to microfabrication / |
| title_short | Introduction to microfabrication / |
| title_sort | introduction to microfabrication |
| topic | Microelectromechanical systems Electronic apparatus and appliances Microfabrication |
| work_keys_str_mv | AT 221658franssilasami introductiontomicrofabrication |