Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /
Includes bibliographical references and index
| Main Authors: | , |
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| Format: | |
| Language: | eng |
| Published: |
Hauppauge, N.Y. : Nova Science Publishers,
c201
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| Subjects: |
| _version_ | 1796736633109741568 |
|---|---|
| author | Ekwall, Britt Cronquist, Mikkel |
| author_facet | Ekwall, Britt Cronquist, Mikkel |
| author_sort | Ekwall, Britt |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T10:36:33Z |
| format | |
| id | KOHA-OAI-TEST:442246 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T10:36:33Z |
| publishDate | c201 |
| publisher | Hauppauge, N.Y. : Nova Science Publishers, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4422462020-12-19T17:15:59ZMicro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / Ekwall, Britt Cronquist, Mikkel Hauppauge, N.Y. : Nova Science Publishers,c2010engIncludes bibliographical references and indexPSZJBLMicroelectromechanical systemsURN:ISBN:9781608764747 (hbk.)URN:ISBN:1608764745 (hbk.) |
| spellingShingle | Microelectromechanical systems Ekwall, Britt Cronquist, Mikkel Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title | Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title_full | Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title_fullStr | Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title_full_unstemmed | Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title_short | Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / |
| title_sort | micro electro mechanical systems mems technology fabrication processes and applications |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT ekwallbritt microelectromechanicalsystemsmemstechnologyfabricationprocessesandapplications AT cronquistmikkel microelectromechanicalsystemsmemstechnologyfabricationprocessesandapplications |