Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /

Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /

Includes bibliographical references and index

Библиографические подробности
Главные авторы:	Ekwall, Britt, Cronquist, Mikkel
Формат:
Язык:	eng
Опубликовано:	Hauppauge, N.Y. : Nova Science Publishers, c201
Предметы:	Microelectromechanical systems

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