Plasmochemical deposition of silicon nitride films in the SiH4-Ar-N2 system studied by optical emission spectroscopy/

PSZJBL

Bibliographic Details
Main Authors:	495970 Aleksandrov, S. E., Kovalgin, A. Yu
Format:
Language:	eng
Subjects:	Silicon nitride Optical spectroscopy Emission spectroscopy

Description
Summary:	PSZJBL

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