Fundamentals of microfabrication and nanotechnology /
Includes bibliographical references and index.
| Main Author: | |
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| Format: | |
| Language: | eng |
| Published: |
Boca Raton, FL : CRC Press,
c201
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| Subjects: |
| _version_ | 1796737610149789696 |
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| author | 302240 Madou, Marc J. |
| author_facet | 302240 Madou, Marc J. |
| author_sort | 302240 Madou, Marc J. |
| collection | OCEAN |
| description | Includes bibliographical references and index. |
| first_indexed | 2024-03-05T10:50:42Z |
| format | |
| id | KOHA-OAI-TEST:446974 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T10:50:42Z |
| publishDate | c201 |
| publisher | Boca Raton, FL : CRC Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4469742020-12-19T17:16:13ZFundamentals of microfabrication and nanotechnology / 302240 Madou, Marc J. Boca Raton, FL : CRC Press,c2012.engIncludes bibliographical references and index.v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.PSZJBLMicroelectromechanical systems.Nanoelectromechanical systems.Microfluidics.Solid-state physicsURN:ISBN:9781420055115 (v. 1)URN:ISBN:1420055119 (v. 1)URN:ISBN:9781420055191 (v.2)URN:ISBN:1420055194 (v.2)URN:ISBN:9781420055160 (v.3)URN:ISBN:142005516X (v.3) |
| spellingShingle | Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid-state physics 302240 Madou, Marc J. Fundamentals of microfabrication and nanotechnology / |
| title | Fundamentals of microfabrication and nanotechnology / |
| title_full | Fundamentals of microfabrication and nanotechnology / |
| title_fullStr | Fundamentals of microfabrication and nanotechnology / |
| title_full_unstemmed | Fundamentals of microfabrication and nanotechnology / |
| title_short | Fundamentals of microfabrication and nanotechnology / |
| title_sort | fundamentals of microfabrication and nanotechnology |
| topic | Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid-state physics |
| work_keys_str_mv | AT 302240madoumarcj fundamentalsofmicrofabricationandnanotechnology |