Fundamentals of microfabrication and nanotechnology /

Fundamentals of microfabrication and nanotechnology /

Includes bibliographical references and index.

Bibliographic Details
Main Author:	302240 Madou, Marc J.
Format:
Language:	eng
Published:	Boca Raton, FL : CRC Press, c201
Subjects:	Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid-state physics

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