Mems reliability /
Includes bibliographical references and index
| Main Authors: | , , , |
|---|---|
| 格式: | |
| 语言: | eng |
| 出版: |
New York : Springer,
2011
|
| 主题: |
| _version_ | 1826446816014499840 |
|---|---|
| author | 515555 Hartzell, Allyson L. Da Silva, Mark G. Shea, Herbert R. Senturia, Stephen D., 1940- |
| author_facet | 515555 Hartzell, Allyson L. Da Silva, Mark G. Shea, Herbert R. Senturia, Stephen D., 1940- |
| author_sort | 515555 Hartzell, Allyson L. |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T11:02:27Z |
| format | |
| id | KOHA-OAI-TEST:450876 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T11:02:27Z |
| publishDate | 2011 |
| publisher | New York : Springer, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4508762020-12-19T17:16:23ZMems reliability / 515555 Hartzell, Allyson L. Da Silva, Mark G. Shea, Herbert R. Senturia, Stephen D., 1940- New York : Springer,2011engIncludes bibliographical references and indexPSZJBLMicroelectromechanical systemsURN:ISBN:9781441960177 (hbk.) |
| spellingShingle | Microelectromechanical systems 515555 Hartzell, Allyson L. Da Silva, Mark G. Shea, Herbert R. Senturia, Stephen D., 1940- Mems reliability / |
| title | Mems reliability / |
| title_full | Mems reliability / |
| title_fullStr | Mems reliability / |
| title_full_unstemmed | Mems reliability / |
| title_short | Mems reliability / |
| title_sort | mems reliability |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT 515555hartzellallysonl memsreliability AT dasilvamarkg memsreliability AT sheaherbertr memsreliability AT senturiastephend1940 memsreliability |