Mems reliability /

Mems reliability /

Includes bibliographical references and index

Detalhes bibliográficos
Principais autores:	515555 Hartzell, Allyson L., Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D., 1940-
Formato:
Idioma:	eng
Publicado em:	New York : Springer, 2011
Assuntos:	Microelectromechanical systems

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