Mems reliability /

Mems reliability /

Includes bibliographical references and index

Dades bibliogràfiques
Autors principals: 515555 Hartzell, Allyson L., Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D., 1940-
Format:
Idioma:eng
Publicat: New York : Springer, 2011
Matèries:
Microelectromechanical systems

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