Mems reliability /

Mems reliability /

Includes bibliographical references and index

Bibliográfalaš dieđut
Váldodahkkit: 515555 Hartzell, Allyson L., Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D., 1940-
Materiálatiipa:
Giella:eng
Almmustuhtton: New York : Springer, 2011
Fáttát:
Microelectromechanical systems

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