Modelling of MEMS Fabry Perot pressure sensors /
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011
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| Language: | eng |
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2011
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| _version_ | 1826447695569485824 |
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| author | Nabil Fahmi Azizan, 1988- , author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik |
| author_facet | Nabil Fahmi Azizan, 1988- , author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik |
| author_sort | Nabil Fahmi Azizan, 1988- , author |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011 |
| first_indexed | 2024-03-05T11:15:04Z |
| format | |
| id | KOHA-OAI-TEST:455091 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T11:15:04Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4550912020-12-19T17:16:35ZModelling of MEMS Fabry Perot pressure sensors / Nabil Fahmi Azizan, 1988- , author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik 2011engProject Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011Includes bibliographical referencesFEELECTLMicroelectromechanical systems |
| spellingShingle | Microelectromechanical systems Nabil Fahmi Azizan, 1988- , author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik Modelling of MEMS Fabry Perot pressure sensors / |
| title | Modelling of MEMS Fabry Perot pressure sensors / |
| title_full | Modelling of MEMS Fabry Perot pressure sensors / |
| title_fullStr | Modelling of MEMS Fabry Perot pressure sensors / |
| title_full_unstemmed | Modelling of MEMS Fabry Perot pressure sensors / |
| title_short | Modelling of MEMS Fabry Perot pressure sensors / |
| title_sort | modelling of mems fabry perot pressure sensors |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT nabilfahmiazizan1988author modellingofmemsfabryperotpressuresensors AT norhafizahngajikinsupervisor modellingofmemsfabryperotpressuresensors AT fakultikejuruteraanelektrik modellingofmemsfabryperotpressuresensors |