Modelling of MEMS Fabry Perot pressure sensors /

Modelling of MEMS Fabry Perot pressure sensors /

Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011

Библиографические подробности
Главные авторы:	Nabil Fahmi Azizan, 1988- , author, Nor Hafizah Ngajikin, supervisor, Fakulti Kejuruteraan Elektrik
Формат:
Язык:	eng
Опубликовано:	2011
Предметы:	Microelectromechanical systems

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