Modelling of MEMS Fabry Perot pressure sensors [electronic resource] /
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011
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ভাষা: | eng |
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2011
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author | Nabil Fahmi Azizan, 1988- , author |
author_facet | Nabil Fahmi Azizan, 1988- , author |
author_sort | Nabil Fahmi Azizan, 1988- , author |
collection | OCEAN |
description | Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011 |
first_indexed | 2024-03-05T11:15:04Z |
format | |
id | KOHA-OAI-TEST:455092 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T11:15:04Z |
publishDate | 2011 |
record_format | dspace |
spelling | KOHA-OAI-TEST:4550922020-12-19T17:16:35ZModelling of MEMS Fabry Perot pressure sensors [electronic resource] / Nabil Fahmi Azizan, 1988- , author 2011engProject Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2011Includes bibliographical referencesPSZJBLMicroelectromechanical systems |
spellingShingle | Microelectromechanical systems Nabil Fahmi Azizan, 1988- , author Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title | Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title_full | Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title_fullStr | Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title_full_unstemmed | Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title_short | Modelling of MEMS Fabry Perot pressure sensors [electronic resource] / |
title_sort | modelling of mems fabry perot pressure sensors electronic resource |
topic | Microelectromechanical systems |
work_keys_str_mv | AT nabilfahmiazizan1988author modellingofmemsfabryperotpressuresensorselectronicresource |