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Pembangunan reaktor DC PECVD d...
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Pembangunan reaktor DC PECVD dan kajian struktur filem tipis karbon amorfus terhidrogen (a-C:H) /
Thesis (Ph.D (Fizik)) - Universiti Teknologi Malaysia, 2004
Bibliographic Details
Main Authors:
Putut Marwoto, 1963-
,
Samsudi Sakrani, supervisor
,
Bakar Ismail, supervisor
,
Fakulti Sains
Format:
Language:
may
Published:
2004
Subjects:
Chemical vapor deposition
Thin films
Holdings
Description
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