Pembangunan reaktor DC PECVD dan kajian struktur filem tipis karbon amorfus terhidrogen (a-C:H) /

Pembangunan reaktor DC PECVD dan kajian struktur filem tipis karbon amorfus terhidrogen (a-C:H) /

Thesis (Ph.D (Fizik)) - Universiti Teknologi Malaysia, 2004

Bibliographic Details
Main Authors:	Putut Marwoto, 1963-, Samsudi Sakrani, supervisor, Bakar Ismail, supervisor, Fakulti Sains
Format:
Language:	may
Published:	2004
Subjects:	Chemical vapor deposition Thin films

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