Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition [electronic resource] /

Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition [electronic resource] /

Thesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2011

Bibliographic Details
Main Author:	Habib Hamidinezhad, 1975-
Format:
Language:	eng
Published:	2011
Subjects:	Silicon Nanowires

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