Digital Holography for MEMS and Microsystem Metrology /

Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evalu...

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Main Author: Asundi, Anand, editor 522499
Format: text
Language:eng
Published: Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011
Subjects:
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author Asundi, Anand, editor 522499
author_facet Asundi, Anand, editor 522499
author_sort Asundi, Anand, editor 522499
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description Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.
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spelling KOHA-OAI-TEST:4643652021-06-16T06:17:26ZDigital Holography for MEMS and Microsystem Metrology / Asundi, Anand, editor 522499 textChichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley,2011©2011engApproaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.Includes bibliographical references and index.Introduction / Anand Asundi. -- Digital Reflection Holography and Applications / Vijay Raj Singh, Anand Asundi. -- Digital Transmission Holography and Applications / Qu Weijuan. -- Digital In-Line Holography and Applications / Taslima Khanam. -- Other Applications / Caojin Yuan, Hongchen Zhai, Yu Yingjie, Jianlin Zhao. -- Conclusion / Anand Asundi.Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.PSZ_JBMicroelectromechanical systemsMicroelectronicsHolographic testingImage processingURN:ISBN:9780470978696
spellingShingle Microelectromechanical systems
Microelectronics
Holographic testing
Image processing
Asundi, Anand, editor 522499
Digital Holography for MEMS and Microsystem Metrology /
title Digital Holography for MEMS and Microsystem Metrology /
title_full Digital Holography for MEMS and Microsystem Metrology /
title_fullStr Digital Holography for MEMS and Microsystem Metrology /
title_full_unstemmed Digital Holography for MEMS and Microsystem Metrology /
title_short Digital Holography for MEMS and Microsystem Metrology /
title_sort digital holography for mems and microsystem metrology
topic Microelectromechanical systems
Microelectronics
Holographic testing
Image processing
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