Digital Holography for MEMS and Microsystem Metrology /
Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evalu...
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Format: | text |
Language: | eng |
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Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley,
2011
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author | Asundi, Anand, editor 522499 |
author_facet | Asundi, Anand, editor 522499 |
author_sort | Asundi, Anand, editor 522499 |
collection | OCEAN |
description | Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. |
first_indexed | 2024-03-05T11:42:57Z |
format | text |
id | KOHA-OAI-TEST:464365 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T11:42:57Z |
publishDate | 2011 |
publisher | Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, |
record_format | dspace |
spelling | KOHA-OAI-TEST:4643652021-06-16T06:17:26ZDigital Holography for MEMS and Microsystem Metrology / Asundi, Anand, editor 522499 textChichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley,2011©2011engApproaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.Includes bibliographical references and index.Introduction / Anand Asundi. -- Digital Reflection Holography and Applications / Vijay Raj Singh, Anand Asundi. -- Digital Transmission Holography and Applications / Qu Weijuan. -- Digital In-Line Holography and Applications / Taslima Khanam. -- Other Applications / Caojin Yuan, Hongchen Zhai, Yu Yingjie, Jianlin Zhao. -- Conclusion / Anand Asundi.Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.PSZ_JBMicroelectromechanical systemsMicroelectronicsHolographic testingImage processingURN:ISBN:9780470978696 |
spellingShingle | Microelectromechanical systems Microelectronics Holographic testing Image processing Asundi, Anand, editor 522499 Digital Holography for MEMS and Microsystem Metrology / |
title | Digital Holography for MEMS and Microsystem Metrology / |
title_full | Digital Holography for MEMS and Microsystem Metrology / |
title_fullStr | Digital Holography for MEMS and Microsystem Metrology / |
title_full_unstemmed | Digital Holography for MEMS and Microsystem Metrology / |
title_short | Digital Holography for MEMS and Microsystem Metrology / |
title_sort | digital holography for mems and microsystem metrology |
topic | Microelectromechanical systems Microelectronics Holographic testing Image processing |
work_keys_str_mv | AT asundianandeditor522499 digitalholographyformemsandmicrosystemmetrology |