Digital Holography for MEMS and Microsystem Metrology /
Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evalu...
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| Format: | text |
| Language: | eng |
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Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley,
2011
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