Handbook of thin film deposition : techniques, processes and technologies /
Includes bibliographical references and index
| Main Author: | |
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| Format: | |
| Language: | eng |
| Published: |
Oxford : William Andrew,
2012
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| Subjects: |
| _version_ | 1826449999338143744 |
|---|---|
| author | Seshan, Krishna |
| author_facet | Seshan, Krishna |
| author_sort | Seshan, Krishna |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T11:48:34Z |
| format | |
| id | KOHA-OAI-TEST:466246 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T11:48:34Z |
| publishDate | 2012 |
| publisher | Oxford : William Andrew, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4662462020-12-19T17:17:07ZHandbook of thin film deposition : techniques, processes and technologies / Seshan, Krishna Oxford : William Andrew,2012engIncludes bibliographical references and indexPSZJBLThin filmsURN:ISBN:9781437778731 (hbk.) |
| spellingShingle | Thin films Seshan, Krishna Handbook of thin film deposition : techniques, processes and technologies / |
| title | Handbook of thin film deposition : techniques, processes and technologies / |
| title_full | Handbook of thin film deposition : techniques, processes and technologies / |
| title_fullStr | Handbook of thin film deposition : techniques, processes and technologies / |
| title_full_unstemmed | Handbook of thin film deposition : techniques, processes and technologies / |
| title_short | Handbook of thin film deposition : techniques, processes and technologies / |
| title_sort | handbook of thin film deposition techniques processes and technologies |
| topic | Thin films |
| work_keys_str_mv | AT seshankrishna handbookofthinfilmdepositiontechniquesprocessesandtechnologies |