Handbook of thin film deposition : techniques, processes and technologies /
Includes bibliographical references and index
Main Author: | |
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Format: | |
Language: | eng |
Published: |
Oxford : William Andrew,
2012
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Subjects: |
_version_ | 1826449999338143744 |
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author | Seshan, Krishna |
author_facet | Seshan, Krishna |
author_sort | Seshan, Krishna |
collection | OCEAN |
description | Includes bibliographical references and index |
first_indexed | 2024-03-05T11:48:34Z |
format | |
id | KOHA-OAI-TEST:466246 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T11:48:34Z |
publishDate | 2012 |
publisher | Oxford : William Andrew, |
record_format | dspace |
spelling | KOHA-OAI-TEST:4662462020-12-19T17:17:07ZHandbook of thin film deposition : techniques, processes and technologies / Seshan, Krishna Oxford : William Andrew,2012engIncludes bibliographical references and indexPSZJBLThin filmsURN:ISBN:9781437778731 (hbk.) |
spellingShingle | Thin films Seshan, Krishna Handbook of thin film deposition : techniques, processes and technologies / |
title | Handbook of thin film deposition : techniques, processes and technologies / |
title_full | Handbook of thin film deposition : techniques, processes and technologies / |
title_fullStr | Handbook of thin film deposition : techniques, processes and technologies / |
title_full_unstemmed | Handbook of thin film deposition : techniques, processes and technologies / |
title_short | Handbook of thin film deposition : techniques, processes and technologies / |
title_sort | handbook of thin film deposition techniques processes and technologies |
topic | Thin films |
work_keys_str_mv | AT seshankrishna handbookofthinfilmdepositiontechniquesprocessesandtechnologies |