Handbook of thin film deposition : techniques, processes and technologies /

Includes bibliographical references and index

Bibliographic Details
Main Author: Seshan, Krishna
Format:
Language:eng
Published: Oxford : William Andrew, 2012
Subjects:
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author Seshan, Krishna
author_facet Seshan, Krishna
author_sort Seshan, Krishna
collection OCEAN
description Includes bibliographical references and index
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institution Universiti Teknologi Malaysia - OCEAN
language eng
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publishDate 2012
publisher Oxford : William Andrew,
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spelling KOHA-OAI-TEST:4662462020-12-19T17:17:07ZHandbook of thin film deposition : techniques, processes and technologies / Seshan, Krishna Oxford : William Andrew,2012engIncludes bibliographical references and indexPSZJBLThin filmsURN:ISBN:9781437778731 (hbk.)
spellingShingle Thin films
Seshan, Krishna
Handbook of thin film deposition : techniques, processes and technologies /
title Handbook of thin film deposition : techniques, processes and technologies /
title_full Handbook of thin film deposition : techniques, processes and technologies /
title_fullStr Handbook of thin film deposition : techniques, processes and technologies /
title_full_unstemmed Handbook of thin film deposition : techniques, processes and technologies /
title_short Handbook of thin film deposition : techniques, processes and technologies /
title_sort handbook of thin film deposition techniques processes and technologies
topic Thin films
work_keys_str_mv AT seshankrishna handbookofthinfilmdepositiontechniquesprocessesandtechnologies