Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology /
PRZSL
| Main Authors: | , , , , |
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| Format: | |
| Language: | eng |
| Published: |
Skudai : Universiti Teknologi Malaysia,
2009
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| Summary: | PRZSL |
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