Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology /
PRZSL
| Main Authors: | , , , , |
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| Format: | |
| Language: | eng |
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Skudai : Universiti Teknologi Malaysia,
2009
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| _version_ | 1796741840659021824 |
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| author | Ismail Saad, 1974-, author Razak M. A Lee, author Munawar Agus Riyadi, 1977-, author Zul Atfyi Fauzan Mohammed Napiah, 1983-, author Razali Ismail, 1960-, author |
| author_facet | Ismail Saad, 1974-, author Razak M. A Lee, author Munawar Agus Riyadi, 1977-, author Zul Atfyi Fauzan Mohammed Napiah, 1983-, author Razali Ismail, 1960-, author |
| author_sort | Ismail Saad, 1974-, author |
| collection | OCEAN |
| description | PRZSL |
| first_indexed | 2024-03-05T11:50:32Z |
| format | |
| id | KOHA-OAI-TEST:466883 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T11:50:32Z |
| publishDate | 2009 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4668832020-12-19T17:17:09ZEnhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / Ismail Saad, 1974-, author Razak M. A Lee, author Munawar Agus Riyadi, 1977-, author Zul Atfyi Fauzan Mohammed Napiah, 1983-, author Razali Ismail, 1960-, author Skudai : Universiti Teknologi Malaysia,2009engPRZSL |
| spellingShingle | Ismail Saad, 1974-, author Razak M. A Lee, author Munawar Agus Riyadi, 1977-, author Zul Atfyi Fauzan Mohammed Napiah, 1983-, author Razali Ismail, 1960-, author Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title | Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title_full | Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title_fullStr | Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title_full_unstemmed | Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title_short | Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / |
| title_sort | enhanced performance of nanoscale vertical mosfet by oblique rotating implantation ori and fillet local oxidation filox ori technology |
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