Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology /

Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology /

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Bibliographic Details
Main Authors:	Ismail Saad, 1974-, author, Razak M. A Lee, author, Munawar Agus Riyadi, 1977-, author, Zul Atfyi Fauzan Mohammed Napiah, 1983-, author, Razali Ismail, 1960-, author
Format:
Language:	eng
Published:	Skudai : Universiti Teknologi Malaysia, 2009

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