A guide to hands-on MEMS design and prototyping /
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
Үндсэн зохиолч: | 531337 Kubby, Joel A. |
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Формат: | |
Хэл сонгох: | eng |
Хэвлэсэн: |
Cambridge, UK ; New York : Cambridge University Press,
2011
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Нөхцлүүд: |
Ижил төстэй зүйлс
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