The effect of substrate temperature on the growth of Al thin film on silicon wafer(100) substrate /

The effect of substrate temperature on the growth of Al thin film on silicon wafer(100) substrate /

Project Paper (Sarjana Muda Kejuruteran (Mekanikal - Bahan)) - Universiti Teknologi Malaysia, 2012

Bibliographic Details
Main Authors: Phong, Wei Loon, 1988-, Muhamad Azizi Mat Yajid, supervisor, Fakulti Kejuruteraan Mekanikal
Format:
Language:eng
Published: 2012
Subjects:
Thin films

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