Analysis of MEMS fabry perot pressure sensor diaphragm /

Analysis of MEMS fabry perot pressure sensor diaphragm /

Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012

Bibliographic Details
Main Authors: Intan Kairunisa Othman, 1989-, author, Nor Hafizah Ngajikin, 1978-, supervisor, Fakulti Kejuruteraan Elektrik
Format:
Language:eng
Published: 2012
Subjects:
Microelectromechanical systems
Description
Summary:Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012

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