Analysis of MEMS fabry perot pressure sensor diaphragm /
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012
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| Language: | eng |
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2012
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| _version_ | 1796744028695298048 |
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| author | Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik |
| author_facet | Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik |
| author_sort | Intan Kairunisa Othman, 1989-, author |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012 |
| first_indexed | 2024-03-05T12:20:38Z |
| format | |
| id | KOHA-OAI-TEST:476928 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:20:38Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4769282020-12-19T17:17:35ZAnalysis of MEMS fabry perot pressure sensor diaphragm / Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik 2012engProject Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012Includes bibliographical referencesPRZSLMicroelectromechanical systems |
| spellingShingle | Microelectromechanical systems Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_full | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_fullStr | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_full_unstemmed | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_short | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_sort | analysis of mems fabry perot pressure sensor diaphragm |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT intankairunisaothman1989author analysisofmemsfabryperotpressuresensordiaphragm AT norhafizahngajikin1978supervisor analysisofmemsfabryperotpressuresensordiaphragm AT fakultikejuruteraanelektrik analysisofmemsfabryperotpressuresensordiaphragm |