Analysis of MEMS fabry perot pressure sensor diaphragm /
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012
| Những tác giả chính: | , , |
|---|---|
| Định dạng: | |
| Ngôn ngữ: | eng |
| Được phát hành: |
2012
|
| Những chủ đề: |
| _version_ | 1826452226168586240 |
|---|---|
| author | Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik |
| author_facet | Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik |
| author_sort | Intan Kairunisa Othman, 1989-, author |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012 |
| first_indexed | 2024-03-05T12:20:38Z |
| format | |
| id | KOHA-OAI-TEST:476928 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:20:38Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4769282020-12-19T17:17:35ZAnalysis of MEMS fabry perot pressure sensor diaphragm / Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik 2012engProject Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012Includes bibliographical referencesPRZSLMicroelectromechanical systems |
| spellingShingle | Microelectromechanical systems Intan Kairunisa Othman, 1989-, author Nor Hafizah Ngajikin, 1978-, supervisor Fakulti Kejuruteraan Elektrik Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_full | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_fullStr | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_full_unstemmed | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_short | Analysis of MEMS fabry perot pressure sensor diaphragm / |
| title_sort | analysis of mems fabry perot pressure sensor diaphragm |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT intankairunisaothman1989author analysisofmemsfabryperotpressuresensordiaphragm AT norhafizahngajikin1978supervisor analysisofmemsfabryperotpressuresensordiaphragm AT fakultikejuruteraanelektrik analysisofmemsfabryperotpressuresensordiaphragm |