Analysis of MEMS fabry perot pressure sensor diaphragm /

Analysis of MEMS fabry perot pressure sensor diaphragm /

Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012

Sonraí bibleagrafaíochta
Príomhchruthaitheoirí:	Intan Kairunisa Othman, 1989-, author, Nor Hafizah Ngajikin, 1978-, supervisor, Fakulti Kejuruteraan Elektrik
Formáid:
Teanga:	eng
Foilsithe / Cruthaithe:	2012
Ábhair:	Microelectromechanical systems

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