Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process /
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012
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| Language: | eng |
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2012
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| _version_ | 1796744051577323520 |
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| author | Low, Yee Ling, 1988-, author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik |
| author_facet | Low, Yee Ling, 1988-, author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik |
| author_sort | Low, Yee Ling, 1988-, author |
| collection | OCEAN |
| description | Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012 |
| first_indexed | 2024-03-05T12:20:53Z |
| format | |
| id | KOHA-OAI-TEST:477014 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:20:53Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4770142020-12-19T17:17:35ZModelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / Low, Yee Ling, 1988-, author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik 2012engProject Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012Includes bibliographical referencesPRZSLMetal oxide semiconductors, Complementary |
| spellingShingle | Metal oxide semiconductors, Complementary Low, Yee Ling, 1988-, author Nor Hafizah Ngajikin, supervisor Fakulti Kejuruteraan Elektrik Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title | Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title_full | Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title_fullStr | Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title_full_unstemmed | Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title_short | Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process / |
| title_sort | modelling of mems fabry perot pressure sensor using cmos fabrication process |
| topic | Metal oxide semiconductors, Complementary |
| work_keys_str_mv | AT lowyeeling1988author modellingofmemsfabryperotpressuresensorusingcmosfabricationprocess AT norhafizahngajikinsupervisor modellingofmemsfabryperotpressuresensorusingcmosfabricationprocess AT fakultikejuruteraanelektrik modellingofmemsfabryperotpressuresensorusingcmosfabricationprocess |