Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process /

Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process /

Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012

Bibliographic Details
Main Authors:	Low, Yee Ling, 1988-, author, Nor Hafizah Ngajikin, supervisor, Fakulti Kejuruteraan Elektrik
Format:
Language:	eng
Published:	2012
Subjects:	Metal oxide semiconductors, Complementary

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